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(Invited) Characterization of UV Excitation Accelerated Material Changes on as-Grown SiC Epitaxial Layers and Their Impact on Defect Detection
Das, Hrishikesh, Sunkari, Swapna, Justice, Joshua, Konstantinov, Andrei, Gumaelius, Krister, Svedberg, Jan-Olov, Allerstam, FredrikVolume:
86
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/08612.0069ecst
Date:
July, 2018
File:
PDF, 2.96 MB
english, 2018