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Heterogeneous bonding between cyclo-olefin polymer (COP) and glass-like substrate by newly developed water vapor-assisted plasma, Aqua Plasma Cleaner
Terai, Hirokazu, Funahashi, Risa, Hashimoto, Taichi, Kakuta, MasayaLanguage:
english
Journal:
Electrical Engineering in Japan
DOI:
10.1002/eej.23164
Date:
November, 2018
File:
PDF, 1.37 MB
english, 2018