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Atomic-layer deposition of crystalline BeO on SiC
Lee, Seung Min, Jang, Yoonseo, Jung, Jongho, Yum, Jung Hwan, Larsen, Eric S., Bielawski, Christopher W., Wang, Weijie, Ryou, Jae-Hyun, Kim, Hyun-Seop, Cha, Ho-Young, Oh, JungwooVolume:
469
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2018.09.239
Date:
March, 2019
File:
PDF, 2.61 MB
english, 2019