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A Hybrid Thermopneumatic and Electrostatic Microvalve with Integrated Position Sensing
Potkay, Joseph A., Wise, Kensall D.Volume:
3
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi3020379
Date:
April, 2012
File:
PDF, 809 KB
english, 2012