A comparison of emissive and cold floating probe techniques for electric potential measurements in rf inductive discharge
Murzaev, Yaroslav, Liziakin, Gennadii, Gavrikov, Andrei, Timirkhanov, Rinat, Smirnov, ValentinLanguage:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/2058-6272/aaf250
Date:
November, 2018
File:
PDF, 524 KB
english, 2018