Precise sputtering of silicon dioxide by argon cluster ion beams
Korobeishchikov, N. G., Nikolaev, I. V., Roenko, M. A., Atuchin, V. V.Volume:
124
Language:
english
Journal:
Applied Physics A
DOI:
10.1007/s00339-018-2256-3
Date:
December, 2018
File:
PDF, 1.61 MB
english, 2018