Influence of pressure on the properties of AlN deposited by...

  • Main
  • 2018 / 10
  • Influence of pressure on the properties of AlN deposited by...
Micro & Nano Letters 2018 / 10

Influence of pressure on the properties of AlN deposited by DC reactive magnetron sputtering on Si (100) substrate

Li, Tao, Han, Jun, Xing, Yanhui, Deng, Xuguang, Li, Junshuai, Zhang, Li, Shi, Fengfeng, Yu, Lun, Sun, Chi, Zhang, Xiaodong, Zhang, Baoshun
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Language:
english
Journal:
Micro & Nano Letters
DOI:
10.1049/mnl.2018.5293
Date:
October, 2018
File:
PDF, 352 KB
english, 2018
Conversion to is in progress
Conversion to is failed