[AIP ION IMPLANTATION TECHNOLOGY: 17th International Conference on Ion Implantation Technology - Monterey (California) (8–13 June 2008)] AIP Conference Proceedings - Micro Four-Point Probe with High Spatial Resolution for Ion Implantation and Ultra-Shallow Junction Characterization
Kjaer, Daniel, Lin, Rong, Petersen, Dirch Hjorth, Kopalidis, Petros M., Eddy, Ronald, Walker, David A., Egelhoff, William F., Pickert, Larry, Seebauer, Edmund G., Felch, Susan B., Jain, Amitabh, KondrYear:
2008
Language:
english
DOI:
10.1063/1.3033583
File:
PDF, 1.25 MB
english, 2008