Order of Reaction between Photoresist and Atomic Hydrogen...

Applied Physics Express 2010 / 2 Vol. 3; Iss. 2

Order of Reaction between Photoresist and Atomic Hydrogen Generated by a Tungsten Hot-Wire Catalyst

Yamamoto, Masashi, Maruoka, Takeshi, Kono, Akihiko, Horibe, Hideo, Umemoto, Hironobu
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Volume:
3
Language:
english
Journal:
Applied Physics Express
DOI:
10.1143/APEX.3.026501
Date:
February, 2010
File:
PDF, 723 KB
english, 2010
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