Post-Release Deformation and Motion Control of Photonic Waveguide Beams by Tuneable Electrothermal Actuators in Thick SiO2
Wu, Kai, Tichem, MarcelVolume:
9
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi9100496
Date:
September, 2018
File:
PDF, 18.63 MB
english, 2018