Chemical, optical, and electrical characterization of Ga2O3...

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Current Applied Physics 2018 / 11

Chemical, optical, and electrical characterization of Ga2O3 thin films grown by plasma-enhanced atomic layer deposition

Li, Xing, Lu, Hong-Liang, Ma, Hong-Ping, Yang, Jian-Guo, Chen, Jin-Xin, Huang, Wei, Guo, Qixin, Feng, Ji-Jun, Zhang, David Wei
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Language:
english
Journal:
Current Applied Physics
DOI:
10.1016/j.cap.2018.11.013
Date:
November, 2018
File:
PDF, 1.79 MB
english, 2018
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