A film bulk acoustic resonator pressure sensor based on lateral field excitation
Su, Shujing, Geng, Zihui, Ma, Xiaoxin, Tan, Qiulin, Xiong, JijunVolume:
14
Language:
english
Journal:
International Journal of Distributed Sensor Networks
DOI:
10.1177/1550147718814343
Date:
November, 2018
File:
PDF, 1.03 MB
english, 2018