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Recrystallization Phase in He-Implanted 6H-SiC
Liu, Yu-Zhu, Li, Bing-Sheng, Lin, Hua, Zhang, LiVolume:
34
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/34/7/076101
Date:
July, 2017
File:
PDF, 2.74 MB
english, 2017