Interferometric step gauge for CMM verification
Hemming, B, Esala, V-P, Laukkanen, P, Rantanen, A, Viitala, R, Widmaier, T, Kuosmanen, P, Lassila, AVolume:
29
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/1361-6501/aabd2b
Date:
July, 2018
File:
PDF, 848 KB
english, 2018