(111)Si thin layers detachment by stress-induced spallation

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Surface Topography: Metrology and Properties 2018 / 11

(111)Si thin layers detachment by stress-induced spallation

Zayyoun, Najoua, Pingault, Timothée, Ntsoenzok, E, Laanab, Larbi, Ulyashin, Alexander, Azar, Amin S, M'hamdi, Mohammed, Blondeau, Jean-Philippe, Ammar, Mohamed-Ramzi
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Language:
english
Journal:
Surface Topography: Metrology and Properties
DOI:
10.1088/2051-672X/aaf43b
Date:
November, 2018
File:
PDF, 1.20 MB
english, 2018
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