[IEEE 2017 IEEE International Conference on Plasma Science (ICOPS) - Atlantic City, NJ, USA (2017.5.21-2017.5.25)] 2017 IEEE International Conference on Plasma Science (ICOPS) - Observation of Inorganic Layer Contamination by Impurities Originated From Organic Layers During Multilayer PEALD Process for Flexible Electronics Encapsulation

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