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Effect of Conditioner Type and Downforce, and Pad Break-In Time, on Pad Surface Micro-Texture in Chemical Mechanical Planarization
McAllister, Jeffrey, Stuffle, Calliandra, Sampurno, Yasa, Hetherington, Dale, Suarez, Jon Sierra, Borucki, Leonard, Philipossian, AraVolume:
7
Year:
2018
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0261811jss
File:
PDF, 3.30 MB
english, 2018