Scanning effects in coherent fourier scatterometry
Roy, S., Gawhary, O. El, Kumar, N., Pereira, S. F., Urbach, H. P.Volume:
7
Language:
english
Journal:
Journal of the European Optical Society: Rapid Publications
DOI:
10.2971/jeos.2012.12031
Date:
July, 2012
File:
PDF, 4.33 MB
english, 2012