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Preparation of ellipsoidal rod-shaped silica nanocomposite abrasives by Chromium ion/PEG200 induced method for sapphire substrates chemical mechanical polishing
Dong, Yue, Lei, Hong, Liu, Wenqing, Chen, YiVolume:
777
Language:
english
Journal:
Journal of Alloys and Compounds
DOI:
10.1016/j.jallcom.2018.11.080
Date:
March, 2019
File:
PDF, 2.45 MB
english, 2019