Ti/Au/Al/Ni/Au low contact resistance and sharp edge acuity...

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IEEE Electron Device Letters 2018

Ti/Au/Al/Ni/Au low contact resistance and sharp edge acuity for highly scalable AlGaN/GaN HEMTs

Yadav, Yogendra K., Upadhyay, Bhanu B., Meer, Mudassar, Bhardwaj, Navneet, Ganguly, Swaroop, Saha, Dipankar
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Year:
2018
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2018.2884155
File:
PDF, 864 KB
english, 2018
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