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IEEE Transactions on Semiconductor Manufacturing 2018

Spatial Correlated Data Monitoring in Semiconductor Manufacturing Using Gaussian Process Model

Wang, Rui, Zhang, Linmiao, Chen, Nan
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Year:
2018
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/TSM.2018.2883763
File:
PDF, 2.07 MB
english, 2018
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