[IEEE 2018 International Conference on Optical MEMS and Nanophotonics (OMN) - Lausanne (2018.7.29-2018.8.2)] 2018 International Conference on Optical MEMS and Nanophotonics (OMN) - Selective Infiltration Damping of MEMS Scanning Mirrors
Widholz, Georg, Richter, Stefan, Brunner, RobertYear:
2018
Language:
english
DOI:
10.1109/omn.2018.8454622
File:
PDF, 4.99 MB
english, 2018