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Design, Modelling and Simulation of MEMS Piezo-Resistive Pressure Sensor with Clamped Edge Silicon Carbide Circular Diaphragm
Shaklya, Maitreyi, Magam, Sai Pratyusha, Jindal, Sumit KumarYear:
2018
Language:
english
Journal:
SSRN Electronic Journal
DOI:
10.2139/ssrn.3170293
File:
PDF, 611 KB
english, 2018