Luminescent silicon oxycarbide thin films obtained with...

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Journal of Alloys and Compounds 2018 / 11

Luminescent silicon oxycarbide thin films obtained with monomethyl-silane by hot-wire chemical vapor deposition

Ramos-Serrano, J.R., Matsumoto, Y., Méndez-Blas, A., Dutt, A., Morales, C., Oliva, A.I.
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Language:
english
Journal:
Journal of Alloys and Compounds
DOI:
10.1016/j.jallcom.2018.11.353
Date:
November, 2018
File:
PDF, 1.18 MB
english, 2018
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