Room temperature magnetron sputtering and laser annealing...

Vacuum 2019 / 02 Vol. 160

Room temperature magnetron sputtering and laser annealing of ultrathin MoS2 for flexible transistors

Sirota, Benjamin, Glavin, Nicholas, Voevodin, Andrey A.
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Volume:
160
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2018.10.077
Date:
February, 2019
File:
PDF, 1.16 MB
english, 2019
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