Plasma source based on an unbalanced magnetron sputtering...

Plasma source based on an unbalanced magnetron sputtering system

Borisov, D P, Slabodchikov, V A, Kuznetsov, V M
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Volume:
830
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/830/1/012057
Date:
May, 2017
File:
PDF, 1.03 MB
english, 2017
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