Plasma source based on an unbalanced magnetron sputtering system
Borisov, D P, Slabodchikov, V A, Kuznetsov, V MVolume:
830
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/830/1/012057
Date:
May, 2017
File:
PDF, 1.03 MB
english, 2017