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[IEEE 2018 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - Singapore (2018.7.16-2018.7.19)] 2018 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - In-Situ Delayering in Atomic Force Microscope for Sub-20nm Technology Devices
Yap, Matthew, Wei, Teo Chea, Narang, VinodYear:
2018
Language:
english
DOI:
10.1109/IPFA.2018.8452590
File:
PDF, 3.41 MB
english, 2018