Annealing Impact on Interface Properties of Sprayed...

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Journal of Electronic Materials 2018 / 11

Annealing Impact on Interface Properties of Sprayed Al2O3-Based MIS Structure for Silicon Surface Passivation

Zougar, L., Sali, S., Kermadi, S., Boucheham, A., Boumaour, M., Kechouane, M.
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Language:
english
Journal:
Journal of Electronic Materials
DOI:
10.1007/s11664-018-6800-x
Date:
November, 2018
File:
PDF, 1.88 MB
english, 2018
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