![](/img/cover-not-exists.png)
VHF-PECVD FABRICATION PARAMETERS DEPENDENT MORPHOLOGYVARIATION OF GOLD CATALYST ASSISTED SILICON THIN FILM GROWTH
Hamzah, Khaidzir, Abdullah Izat Mohd Yassin, M., Krishna Ghoshal, Sib, Hasanudin, M. Akmal, Ismail, Abdul KhamimVolume:
76
Language:
english
Journal:
Jurnal Teknologi
DOI:
10.11113/jt.v76.4030
Date:
August, 2015
File:
PDF, 582 KB
english, 2015