Estimation of Young's Modulus for Polysilicon Thin Film by...

Journal of the Society of Materials Science Japan 2005 Vol. 54; Iss. 10

Estimation of Young's Modulus for Polysilicon Thin Film by Finite Element Analysis

TANAKA, Kazuto, MINOSHIMA, Kohji, IMOTO, Takehiro
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
54
Year:
2005
Journal:
Journal of the Society of Materials Science, Japan
DOI:
10.2472/jsms.54.1016
File:
PDF, 1.92 MB
2005
Conversion to is in progress
Conversion to is failed