P-10.2: The Influences of PECVD Deposition SiNx on the Thin Film Encapsulation Performance
Liu, Shengfang, Li, Xueyuan, Zhu, Ping, Huang, Ying, Gao, Xiaoyu, Huang, XiuqiVolume:
49
Language:
english
Journal:
SID Symposium Digest of Technical Papers
DOI:
10.1002/sdtp.12821
Date:
April, 2018
File:
PDF, 378 KB
english, 2018