Optimization of carrier morphology in terms of Fourier sine series for chemical mechanical polishing process
Jinn-Tong Chiu, Yeou-Yih LinVolume:
39
Language:
english
Pages:
7
DOI:
10.1007/s00170-007-1226-2
Date:
October, 2008
File:
PDF, 213 KB
english, 2008