Experimental investigation on size-dependent higher-mode vibration of cantilever microbeams
Li, Zhenkun, He, Yuming, Lei, Jian, Han, Shihao, Guo, Song, Liu, DabiaoLanguage:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-018-4244-0
Date:
December, 2018
File:
PDF, 896 KB
english, 2018