Analysis and correction of the distortion error in a DMD...

Optics Communications 2019 / 03 Vol. 434

Analysis and correction of the distortion error in a DMD based scanning lithography system

Li, Qian-Kun, Xiao, Yao, Liu, Hua, Zhang, Hao-Lin, Xu, Jia, Li, Jin-Huan
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Volume:
434
Language:
english
Journal:
Optics Communications
DOI:
10.1016/j.optcom.2018.10.042
Date:
March, 2019
File:
PDF, 1.56 MB
english, 2019
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