A liquid MEMS inclinometer sensor with improved sensitivity
Xu, Han-yang, Zhao, Yu-long, Zhang, Kai, Wang, Zi-xi, Jiang, KyleVolume:
285
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2018.11.046
Date:
January, 2019
File:
PDF, 2.51 MB
english, 2019