A Design-of-Experiments Approach to Characterizing...

A Design-of-Experiments Approach to Characterizing Beam-Induced Deposition in the Helium Ion Microscope

Scipioni, Larry, Sanford, Colin, van Veldhoven, Emile, Maas, Diederik
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Volume:
19
Language:
english
Journal:
Microscopy Today
DOI:
10.1017/S1551929511000307
Date:
April, 2011
File:
PDF, 1.89 MB
english, 2011
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