![](/img/cover-not-exists.png)
Variation risk analysis: MEMS fabrication tolerance for a micro CMM probe
Yunfei Sun, Clifford R. Fowkes, Nabil Gindy, Richard K. LeachVolume:
47
Language:
english
Pages:
8
DOI:
10.1007/s00170-009-2251-0
Date:
April, 2010
File:
PDF, 217 KB
english, 2010