[AIP ION IMPLANTATION TECHNOLOGY: 17th International Conference on Ion Implantation Technology - Monterey (California) (8–13 June 2008)] AIP Conference Proceedings - Carrier Density Profiling of Ultra-Shallow Junction Layers Through Corrected C-V Plotting
Chen, James, Dimitrov, Dimitar, Dimitrova, Tatiana, Timans, Paul, Gelpey, Jeff, McCoy, Steve, Lerch, Wilfried, Paul, Silke, Bolze, Detlef, Seebauer, Edmund G., Felch, Susan B., Jain, Amitabh, KondrateYear:
2008
Language:
english
DOI:
10.1063/1.3033588
File:
PDF, 1.10 MB
english, 2008