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[AIP ION IMPLANTATION TECHNOLOGY: 17th International Conference on Ion Implantation Technology - Monterey (California) (8–13 June 2008)] AIP Conference Proceedings - Evaluation of Pre-Amorphous Layer by Spectroscopic Ellipsometry
Shibata, Satoshi, Kawase, Fumitoshi, Kitada, Akihiko, Kouzaki, Takashi, Seebauer, Edmund G., Felch, Susan B., Jain, Amitabh, Kondratenko, Yevgeniy V.Year:
2008
Language:
english
DOI:
10.1063/1.3033589
File:
PDF, 1.45 MB
english, 2008