![](/img/cover-not-exists.png)
[AIP ION IMPLANTATION TECHNOLOGY: 17th International Conference on Ion Implantation Technology - Monterey (California) (8–13 June 2008)] AIP Conference Proceedings - Beam Angular Divergence Effects in Ion Implantation
Horsky, T. N., Current, M. I., Hahto, S. K., Bilbrough, D. G., Jacobson, D. C., Krull, W. A., Goldberg, R. D., Hamamoto, N., Umisedo, S., Seebauer, Edmund G., Felch, Susan B., Jain, Amitabh, KondratenYear:
2008
Language:
english
DOI:
10.1063/1.3033648
File:
PDF, 1.18 MB
english, 2008