Enhanced surface passivation of predictable quantum efficient detectors by silicon nitride and silicon oxynitride/silicon nitride stack
Stokkan, Therese Sørheim, Haug, Halvard, Tang, Chi Kwong, Marstein, Erik Stensrud, Gran, JarleVolume:
124
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.5054696
Date:
December, 2018
File:
PDF, 949 KB
english, 2018