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Reconfigurable MEMS Latching-Type Capacitors for High Power Applications
Abdel Aziz, Ahmed, Bakri-Kassem, Maher, Mansour, Rafaat RLanguage:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aaf46d
Date:
November, 2018
File:
PDF, 813 KB
english, 2018