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Properties of ta-C coatings prepared by pulsed cathodic arc...

Properties of ta-C coatings prepared by pulsed cathodic arc source at various distances

Chepkasov, S, Zolkin, A, Piliptsou, D, Gladkikh, E, Kravchuk, K
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Volume:
1115
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/1115/3/032066
Date:
November, 2018
File:
PDF, 1002 KB
english, 2018
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