Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2018 / 11 Vol. 36; Iss. 6
Phenol-functionalized polymerization control additives for negative tone epoxide crosslinking molecular resists
Narcross, Hannah, Sharp, Brandon L., Ludovice, Peter J., Tolbert, Laren M., Henderson, Clifford L.Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5057442
Date:
November, 2018
File:
PDF, 1.53 MB
english, 2018