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X-Ray Residual Stress Analysis of Aluminum Nitride Film with c-Axis Orientation on Glass Substrate.
HANABUSA, Takao, TOMINAGA, Kikuo, FUJIWARA, HaruoVolume:
42
Year:
1993
Journal:
Journal of the Society of Materials Science, Japan
DOI:
10.2472/jsms.42.90
File:
PDF, 843 KB
1993