Prediction of surface topography due to finite pixel...

Prediction of surface topography due to finite pixel spacing in focused ion beam milling of circular holes and trenches

Rumyantsev, Alexander V., Borgardt, Nikolay I.
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Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5047107
Date:
November, 2018
File:
PDF, 1.29 MB
english, 2018
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