Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2018 / 11 Vol. 36; Iss. 6
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Prediction of surface topography due to finite pixel spacing in focused ion beam milling of circular holes and trenches
Rumyantsev, Alexander V., Borgardt, Nikolay I.Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5047107
Date:
November, 2018
File:
PDF, 1.29 MB
english, 2018