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Effect of Non-Ionic Surfactant on Chemical Mechanical Planarization Performance in Alkaline Copper Slurry
Xu, Qinzhi, Yang, Fei, Chen, Lan, Cao, HeVolume:
19
Language:
english
Journal:
International Journal of Precision Engineering and Manufacturing
DOI:
10.1007/s12541-018-0186-9
Date:
November, 2018
File:
PDF, 1.06 MB
english, 2018