Preferential sputtering and mass conservation in AES and...

Vacuum 2019 / 02 Vol. 160

Preferential sputtering and mass conservation in AES and SIMS depth profiling

Lian, Songyou, Lin, Bing, Yan, Xinliang, Wang, Jiangyong, Xu, Congkang
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Volume:
160
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2018.11.020
Date:
February, 2019
File:
PDF, 1.45 MB
english, 2019
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