In-Situ TEM Investigation of Controlled VLS Silicon...

In-Situ TEM Investigation of Controlled VLS Silicon Nanowire Device Formation and Characterization

Alam, S.B., Panciera, F., Norton, M.M, Hansen, O., Ross, F.M., Mølhave, K.
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Volume:
22
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927616012320
Date:
November, 2016
File:
PDF, 149 KB
english, 2016
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