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Monolithic Multi Degree of Freedom (MDoF) Capacitive MEMS Accelerometers
Mohammed, Zakriya, Elfadel, Ibrahim, Rasras, MahmoudVolume:
9
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi9110602
Date:
November, 2018
File:
PDF, 2.97 MB
english, 2018